000 01134nam a2200253 a 4500
001 ASIN0471232793
003 OSt
005 20190522132939.0
008 150516s2003 xxu eng d
020 _a0471232793 (paperback)
_c$89.16
020 _a9780471232797 (paperback)
037 _c5370.00 PKR
040 _cAUI
100 1 _aMay, Gary S.
_912846
245 1 0 _aFundamentals of semiconductor fabrication /
_cGary S. May, Simon M. Sze.
250 _a1st ed.
260 _a[S.l.] :
_bWiley,
_c2003.
300 _a320 p. ;
_c27 cm.
500 _aInternational Edition.
520 _aOffers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory.
700 1 _aSze, Simon M.
_912847
856 4 0 _3Amazon.com
_uhttp://www.amazon.com/exec/obidos/ASIN/0471232793/chopaconline-20
942 _2ddc
_cBK
999 _c8460
_d8460