000 00328nam a2200133Ia 4500
005 20251003125850.0
008 251003s9999 xx 000 0 und d
082 _a621.381
100 _aGhandhi
245 0 _aVlsi Fabrication Principles Silicon & Gallium Arsenide
260 _bJohn Wiely
_c2010
300 _a833
942 _cBK
999 _c40011
_d40011