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| 005 | 20251003125843.0 | ||
| 008 | 251003s9999 xx 000 0 und d | ||
| 082 | _a621.38104 | ||
| 100 | _aMotamedi, Manouchehr | ||
| 245 | 0 | _aMoems: Micro-Opto-Electro-Mechanical System | |
| 260 |
_bNew Age International _aNew Delhi _c2010 |
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| 300 | _a614 | ||
| 942 | _cBK | ||
| 999 |
_c39858 _d39858 |
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