000 00318nam a2200133Ia 4500
005 20251003125839.0
008 251003s9999 xx 000 0 und d
082 _a620
100 _aLobontiu
245 0 _aMechanics Of Microelectomechnical Systems
260 _bSpringer
_aBerlin
_c2005
300 _a405
942 _cBK
999 _c39745
_d39745