000 00331nam a2200133Ia 4500
005 20251003125753.0
008 251003s9999 xx 000 0 und d
082 _a621.3815
100 _aMcguire
245 0 _aSemiconductor Materials & Process Technology Handbook
260 _bJaico
_aBombey
_c2007
300 _a675
942 _cBK
999 _c38564
_d38564