| 000 | 00533nam a2200133 a 4500 | ||
|---|---|---|---|
| 001 | ASINB002K7HUD6 | ||
| 005 | 20190522120808.0 | ||
| 008 | 130314s1992 xxu eng d | ||
| 100 | 1 | _aHelbert, Editor-William B. Glendinning; Editor-John N. | |
| 245 | 1 | 0 |
_aHandbook of vlsi microlithography : _bprinciples / _cEditor-William B. Glendinning; Editor-John N. Helbert. |
| 260 |
_a[S.l.] : _bNoyes Publications, _c1992. |
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| 300 | _a1 v. (unpaged) | ||
| 856 | 4 | 0 |
_3Amazon.com _uhttp://www.amazon.com/exec/obidos/ASIN/B002K7HUD6/chopaconline-20 |
| 999 |
_c3485 _d3485 |
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