000 00506nam a2200193 a 4500
001 ASIN0471580058
003 AUCL
005 20220310113234.0
008 120313s1994 xxu eng d
020 _a9780471580058
040 _cAUKP
082 _a621.38171 GHA
100 1 _aGhandhi, Sorab K.
245 1 0 _aVLSI Fabrication Principles :
_bSilicon and Gallium Arsenide
250 _a2nd ed.
260 _aNew York
_bWiley-Interscience,
_c1994
300 _a834 p. ;
_c24 cm.
942 _2ddc
_cBK
999 _c25058
_d25058