| 000 | 00985nam a2200193 a 4500 | ||
|---|---|---|---|
| 001 | ASIN0471232793 | ||
| 005 | 20190522114511.0 | ||
| 008 | 120224s2003 xxu eng d | ||
| 020 | _a0471232793 (paperback) | ||
| 020 | _a9780471232797 (paperback) | ||
| 100 | 1 | _aMay, Gary S. | |
| 245 | 1 | 0 |
_aFundamentals of semiconductor fabrication / _cGary S. May, Simon M. Sze. |
| 250 | _a1st ed. | ||
| 260 |
_a[S.l.] : _bWiley, _c2003. |
||
| 300 |
_a320 p. ; _c27 cm. |
||
| 520 | _aOffers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory. | ||
| 700 | 1 | _aSze, Simon M. | |
| 856 | 4 | 0 |
_3Amazon.com _uhttp://www.amazon.com/exec/obidos/ASIN/0471232793/chopaconline-20 |
| 999 |
_c2004 _d2004 |
||