000 00963nam a2200181 a 4500
001 ASIN0471333727
005 20190523072801.0
008 130206s2001 xxu eng d
020 _a0471333727 (hardcover)
020 _a9780471333722 (hardcover)
100 1 _aSze, Simon M.
245 1 0 _aSemiconductor devices :
_bphysics and technology, 2nd edition /
_cSimon M. Sze.
250 _a2nd ed.
260 _a[S.l.] :
_bWiley,
_c2001.
300 _a568 p. ;
_c26 cm.
520 _aThis book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
856 4 0 _3Amazon.com
_uhttp://www.amazon.com/exec/obidos/ASIN/0471333727/chopaconline-20
999 _c14516
_d14516