TY  - BOOK
AU  - May,Gary S.
AU  - Sze,Simon M.
TI  - Fundamentals of semiconductor fabrication
SN  - 0471232793 (paperback)
PY  - 2003///
CY  - [S.l.]
PB  - Wiley
N1  - International Edition
N2  - Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory
UR  - http://www.amazon.com/exec/obidos/ASIN/0471232793/chopaconline-20
ER  -