TY  - BOOK
AU  - Helbert,Editor-William B.Glendinning; Editor-John N.
TI  - Handbook of vlsi microlithography: principles 
PY  - 1992///
CY  - [S.l.]
PB  - Noyes Publications
UR  - http://www.amazon.com/exec/obidos/ASIN/B002K7HUD6/chopaconline-20
ER  -