Hsu, Tai-Ran <br/><br/>
MEMS and Microsystems : 

 - Hoboken  John Wiley & Sons  2008 
 - xxv; 550 p. 
<br/><br/><label>ISBN: </label>9780470083017 
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU-M