Hsu, Tai-Ran <br/><br/>
MEMS and Microsystems : Design, Manufacture 

 - Indian Edition 
 - India  MC Graw-Hill  2002 
 - xxv; 436 p.  24 cm 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Dewey Class. No.: </label>621.381 HSU