Semiconductor devices : physics and technology, 2nd edition /
Simon M. Sze.
- 2nd ed.
- [S.l.] : Wiley, 2001.
- 568 p. ; 26 cm.
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.