Semiconductor devices : physics and technology, 2nd edition / Simon M. Sze.

By:

Sze, Simon M

Material type: Text

TextPublication details: [S.l.] : Wiley, 2001.Edition: 2nd edDescription: 568 p. ; 26 cmISBN:

0471333727 (hardcover)
9780471333722 (hardcover)

Online resources:

Amazon.com

Summary: This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.

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Holdings
Item type	Current library	Call number	Status	Barcode
Book	Department of Mechanical and Aerospace Engineering Library	621.3815 SZE (Browse shelf(Opens below))	Available	000158

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This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.

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Semiconductor devices : physics and technology, 2nd edition / Simon M. Sze.

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