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An introduction to microelectromechanical systems engineering, second edition / Nadim Maluf, Kirt Williams.

By: Contributor(s): Material type: TextPublication details: [S.l.] : Artech House Print on Demand, 2004.Edition: 2nd edDescription: 304 p. ; 26 cmISBN:
  • 1580535909 (hardcover)
  • 9781580535908 (hardcover)
Online resources: Summary: MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today's hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.
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Item type Current library Call number Status Barcode
Book Department of Mechanical and Aerospace Engineering Library 621.381 MAL (Browse shelf(Opens below)) Available 000196

MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today's hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.

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