Semiconductor devices : physics and technology, 2nd edition / Simon M. Sze.
Material type:
- 0471333727 (hardcover)
- 9780471333722 (hardcover)
Item type | Current library | Collection | Call number | Status | Barcode | |
---|---|---|---|---|---|---|
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Department of Mechanical and Aerospace Engineering Library | NFIC | 621.3815 SZE (Browse shelf(Opens below)) | Available | IAAP000158 |
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
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