Handbook of vlsi microlithography :
Helbert, Editor-William B. Glendinning; Editor-John N.
Handbook of vlsi microlithography : principles / Editor-William B. Glendinning; Editor-John N. Helbert. - [S.l.] : Noyes Publications, 1992. - 1 v. (unpaged)
Handbook of vlsi microlithography : principles / Editor-William B. Glendinning; Editor-John N. Helbert. - [S.l.] : Noyes Publications, 1992. - 1 v. (unpaged)