MEMS and Microsystems :
Hsu, Tai-Ran
MEMS and Microsystems : - Hoboken John Wiley & Sons 2008 - xxv; 550 p.
9780470083017
621.381 / HSU-M
MEMS and Microsystems : - Hoboken John Wiley & Sons 2008 - xxv; 550 p.
9780470083017
621.381 / HSU-M