Semiconductor devices :
Sze, Simon M.
Semiconductor devices : physics and technology, 2nd edition / Simon M. Sze. - 2nd ed. - [S.l.] : Wiley, 2001. - 568 p. ; 26 cm.
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
0471333727 (hardcover) 9780471333722 (hardcover)
Semiconductor devices : physics and technology, 2nd edition / Simon M. Sze. - 2nd ed. - [S.l.] : Wiley, 2001. - 568 p. ; 26 cm.
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
0471333727 (hardcover) 9780471333722 (hardcover)