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Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze.

By: Contributor(s): Material type: TextTextPublication details: [S.l.] : Wiley, 2003.Edition: 1st edDescription: 320 p. ; 27 cmISBN:
  • 0471232793 (paperback)
  • 9780471232797 (paperback)
Online resources: Summary: Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory.
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Item type Current library Collection Call number Status Barcode
Book Book Air University Central Library Islamabad REF 621.38152 MAY (Browse shelf(Opens below)) Available P3674

Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory.

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